10/8/2012	12:02:02 AM	Helium valve closed
10/8/2012	12:02:05 AM	Helium MFC set to  0.000000
10/8/2012	12:02:27 AM	Recipe started at 12:02 AM
10/8/2012	12:02:27 AM	Helium valve closed
10/8/2012	12:02:27 AM	H2 valve closed
10/8/2012	12:02:27 AM	BCl3 valve closed
10/8/2012	12:02:27 AM	PH3 valve closed
10/8/2012	12:02:27 AM	SiCl4 pre valve closed
10/8/2012	12:02:27 AM	SiCl4 post valve closed
10/8/2012	12:02:27 AM	Main Vac valve closed
10/8/2012	12:02:27 AM	Bypass valve closed
10/8/2012	12:02:27 AM	Bubbler valve closed
10/8/2012	12:02:27 AM	Helium MFC set to  0.000000
10/8/2012	12:02:27 AM	H2 MFC set to  0.000000
10/8/2012	12:02:27 AM	BCl3 MFC set to  0.000000
10/8/2012	12:02:27 AM	PH3 MFC set to  0.000000
10/8/2012	12:02:27 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:02:27 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:02:27 AM	Tube furnace set to 0
10/8/2012	12:02:30 AM	Helium valve closed
10/8/2012	12:02:30 AM	BCl3 valve closed
10/8/2012	12:02:30 AM	PH3 valve closed
10/8/2012	12:02:30 AM	SiCl4 pre valve closed
10/8/2012	12:02:30 AM	SiCl4 post valve closed
10/8/2012	12:02:30 AM	Main Vac valve closed
10/8/2012	12:02:30 AM	Bypass valve closed
10/8/2012	12:02:30 AM	Bubbler valve closed
10/8/2012	12:02:30 AM	H2 valve opened
10/8/2012	12:02:30 AM	Helium MFC set to  0.000000
10/8/2012	12:02:30 AM	H2 MFC set to  500.000000
10/8/2012	12:02:30 AM	BCl3 MFC set to  0.000000
10/8/2012	12:02:30 AM	PH3 MFC set to  0.000000
10/8/2012	12:02:30 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:02:30 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:02:30 AM	Tube furnace set to 0
10/8/2012	12:03:41 AM	Helium valve closed
10/8/2012	12:03:41 AM	BCl3 valve closed
10/8/2012	12:03:41 AM	PH3 valve closed
10/8/2012	12:03:41 AM	SiCl4 pre valve closed
10/8/2012	12:03:41 AM	SiCl4 post valve closed
10/8/2012	12:03:41 AM	Main Vac valve closed
10/8/2012	12:03:41 AM	Bypass valve closed
10/8/2012	12:03:41 AM	H2 valve opened
10/8/2012	12:03:41 AM	Bubbler valve opened
10/8/2012	12:03:41 AM	Helium MFC set to  0.000000
10/8/2012	12:03:41 AM	H2 MFC set to  500.000000
10/8/2012	12:03:41 AM	BCl3 MFC set to  0.000000
10/8/2012	12:03:41 AM	PH3 MFC set to  0.000000
10/8/2012	12:03:41 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:03:41 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:03:41 AM	Tube furnace set to 0
10/8/2012	12:03:42 AM	Helium valve closed
10/8/2012	12:03:42 AM	BCl3 valve closed
10/8/2012	12:03:42 AM	PH3 valve closed
10/8/2012	12:03:42 AM	SiCl4 pre valve closed
10/8/2012	12:03:42 AM	SiCl4 post valve closed
10/8/2012	12:03:42 AM	Main Vac valve closed
10/8/2012	12:03:42 AM	Bypass valve closed
10/8/2012	12:03:42 AM	H2 valve opened
10/8/2012	12:03:42 AM	Bubbler valve opened
10/8/2012	12:03:42 AM	Helium MFC set to  0.000000
10/8/2012	12:03:42 AM	H2 MFC set to  500.000000
10/8/2012	12:03:42 AM	BCl3 MFC set to  0.000000
10/8/2012	12:03:42 AM	PH3 MFC set to  0.000000
10/8/2012	12:03:42 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:03:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:03:42 AM	Tube furnace set to 950
10/8/2012	12:18:42 AM	Helium valve closed
10/8/2012	12:18:42 AM	PH3 valve closed
10/8/2012	12:18:42 AM	SiCl4 pre valve closed
10/8/2012	12:18:42 AM	SiCl4 post valve closed
10/8/2012	12:18:42 AM	Main Vac valve closed
10/8/2012	12:18:42 AM	Bypass valve closed
10/8/2012	12:18:42 AM	H2 valve opened
10/8/2012	12:18:42 AM	BCl3 valve opened
10/8/2012	12:18:42 AM	Bubbler valve opened
10/8/2012	12:18:42 AM	Helium MFC set to  0.000000
10/8/2012	12:18:42 AM	H2 MFC set to  400.000000
10/8/2012	12:18:42 AM	BCl3 MFC set to  20.000000
10/8/2012	12:18:42 AM	PH3 MFC set to  0.000000
10/8/2012	12:18:42 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:18:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:18:42 AM	Tube furnace set to 950
10/8/2012	12:48:42 AM	Helium valve closed
10/8/2012	12:48:42 AM	BCl3 valve closed
10/8/2012	12:48:42 AM	PH3 valve closed
10/8/2012	12:48:42 AM	SiCl4 pre valve closed
10/8/2012	12:48:42 AM	SiCl4 post valve closed
10/8/2012	12:48:42 AM	Main Vac valve closed
10/8/2012	12:48:42 AM	Bypass valve closed
10/8/2012	12:48:42 AM	H2 valve opened
10/8/2012	12:48:42 AM	Bubbler valve opened
10/8/2012	12:48:42 AM	Helium MFC set to  0.000000
10/8/2012	12:48:42 AM	H2 MFC set to  500.000000
10/8/2012	12:48:42 AM	BCl3 MFC set to  0.000000
10/8/2012	12:48:42 AM	PH3 MFC set to  0.000000
10/8/2012	12:48:42 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:48:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:48:42 AM	Tube furnace set to 750
10/8/2012	12:53:42 AM	H2 valve closed
10/8/2012	12:53:43 AM	BCl3 valve closed
10/8/2012	12:53:43 AM	PH3 valve closed
10/8/2012	12:53:43 AM	SiCl4 pre valve closed
10/8/2012	12:53:43 AM	SiCl4 post valve closed
10/8/2012	12:53:43 AM	Main Vac valve closed
10/8/2012	12:53:43 AM	Bypass valve closed
10/8/2012	12:53:43 AM	Helium valve opened
10/8/2012	12:53:43 AM	Bubbler valve opened
10/8/2012	12:53:43 AM	Helium MFC set to  500.000000
10/8/2012	12:53:43 AM	H2 MFC set to  0.000000
10/8/2012	12:53:43 AM	BCl3 MFC set to  0.000000
10/8/2012	12:53:43 AM	PH3 MFC set to  0.000000
10/8/2012	12:53:43 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:53:43 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:53:43 AM	Tube furnace set to 0
10/8/2012	12:55:54 AM	Run aborted at 12:55 AM
10/8/2012	12:55:54 AM	Helium valve closed
10/8/2012	12:55:54 AM	H2 valve closed
10/8/2012	12:55:54 AM	BCl3 valve closed
10/8/2012	12:55:54 AM	PH3 valve closed
10/8/2012	12:55:55 AM	SiCl4 pre valve closed
10/8/2012	12:55:55 AM	SiCl4 post valve closed
10/8/2012	12:55:55 AM	Bypass valve closed
10/8/2012	12:55:55 AM	Main Vac valve closed
10/8/2012	12:55:55 AM	Bubbler valve closed
10/8/2012	12:55:55 AM	Helium MFC set to  0.000000
10/8/2012	12:55:55 AM	H2 MFC set to  0.000000
10/8/2012	12:55:55 AM	BCl3 MFC set to  0.000000
10/8/2012	12:55:55 AM	PH3 MFC set to  0.000000
10/8/2012	12:55:55 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:55:55 AM	Tube furnace set to 0
10/8/2012	12:55:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/8/2012	12:55:57 AM	Recipe started at 12:55 AM
10/8/2012	12:55:57 AM	Helium valve closed
10/8/2012	12:55:57 AM	H2 valve closed
10/8/2012	12:55:57 AM	BCl3 valve closed
10/8/2012	12:55:57 AM	PH3 valve closed
10/8/2012	12:55:57 AM	SiCl4 pre valve closed
10/8/2012	12:55:57 AM	SiCl4 post valve closed
10/8/2012	12:55:57 AM	Main Vac valve closed
10/8/2012	12:55:57 AM	Bypass valve closed
10/8/2012	12:55:57 AM	Bubbler valve closed
10/8/2012	12:55:57 AM	Helium MFC set to  0.000000
10/8/2012	12:55:57 AM	H2 MFC set to  0.000000
10/8/2012	12:55:57 AM	BCl3 MFC set to  0.000000
10/8/2012	12:55:57 AM	PH3 MFC set to  0.000000
10/8/2012	12:55:57 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:55:57 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:55:57 AM	Tube furnace set to 0
10/8/2012	12:56:00 AM	H2 valve closed
10/8/2012	12:56:00 AM	BCl3 valve closed
10/8/2012	12:56:00 AM	PH3 valve closed
10/8/2012	12:56:00 AM	SiCl4 pre valve closed
10/8/2012	12:56:00 AM	SiCl4 post valve closed
10/8/2012	12:56:00 AM	Main Vac valve closed
10/8/2012	12:56:00 AM	Bypass valve closed
10/8/2012	12:56:00 AM	Bubbler valve closed
10/8/2012	12:56:00 AM	Helium valve opened
10/8/2012	12:56:00 AM	Helium MFC set to  500.000000
10/8/2012	12:56:00 AM	H2 MFC set to  0.000000
10/8/2012	12:56:00 AM	BCl3 MFC set to  0.000000
10/8/2012	12:56:00 AM	PH3 MFC set to  0.000000
10/8/2012	12:56:00 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:56:00 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:56:00 AM	Tube furnace set to 0
10/8/2012	12:56:00 AM	Helium valve closed
10/8/2012	12:56:00 AM	H2 valve closed
10/8/2012	12:56:00 AM	BCl3 valve closed
10/8/2012	12:56:00 AM	PH3 valve closed
10/8/2012	12:56:00 AM	SiCl4 pre valve closed
10/8/2012	12:56:00 AM	SiCl4 post valve closed
10/8/2012	12:56:00 AM	Main Vac valve closed
10/8/2012	12:56:00 AM	Bypass valve closed
10/8/2012	12:56:00 AM	Bubbler valve closed
10/8/2012	12:56:01 AM	Helium MFC set to  0.000000
10/8/2012	12:56:01 AM	H2 MFC set to  0.000000
10/8/2012	12:56:01 AM	BCl3 MFC set to  0.000000
10/8/2012	12:56:01 AM	PH3 MFC set to  0.000000
10/8/2012	12:56:01 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:56:01 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:56:01 AM	Tube furnace set to 0
10/8/2012	12:56:02 AM	Run finished at 12:56 AM
10/8/2012	12:56:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/8/2012	12:57:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/8/2012	12:57:59 AM	Recipe started at 12:57 AM
10/8/2012	12:57:59 AM	Helium valve closed
10/8/2012	12:57:59 AM	H2 valve closed
10/8/2012	12:57:59 AM	BCl3 valve closed
10/8/2012	12:57:59 AM	PH3 valve closed
10/8/2012	12:57:59 AM	SiCl4 pre valve closed
10/8/2012	12:57:59 AM	SiCl4 post valve closed
10/8/2012	12:57:59 AM	Main Vac valve closed
10/8/2012	12:57:59 AM	Bubbler valve closed
10/8/2012	12:57:59 AM	Bypass valve opened
10/8/2012	12:57:59 AM	Helium MFC set to  0.000000
10/8/2012	12:57:59 AM	H2 MFC set to  0.000000
10/8/2012	12:57:59 AM	BCl3 MFC set to  0.000000
10/8/2012	12:57:59 AM	PH3 MFC set to  0.000000
10/8/2012	12:57:59 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:57:59 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:57:59 AM	Tube furnace set to 0
10/8/2012	12:58:56 AM	Helium valve closed
10/8/2012	12:58:56 AM	H2 valve closed
10/8/2012	12:58:56 AM	BCl3 valve closed
10/8/2012	12:58:56 AM	PH3 valve closed
10/8/2012	12:58:56 AM	SiCl4 pre valve closed
10/8/2012	12:58:56 AM	SiCl4 post valve closed
10/8/2012	12:58:56 AM	Main Vac valve closed
10/8/2012	12:58:56 AM	Bubbler valve closed
10/8/2012	12:58:56 AM	Bypass valve opened
10/8/2012	12:58:56 AM	Helium MFC set to  0.000000
10/8/2012	12:58:56 AM	H2 MFC set to  0.000000
10/8/2012	12:58:56 AM	BCl3 MFC set to  0.000000
10/8/2012	12:58:56 AM	PH3 MFC set to  0.000000
10/8/2012	12:58:56 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:58:56 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:58:56 AM	Tube furnace set to 0
10/8/2012	12:58:59 AM	Helium valve closed
10/8/2012	12:58:59 AM	H2 valve closed
10/8/2012	12:58:59 AM	BCl3 valve closed
10/8/2012	12:58:59 AM	PH3 valve closed
10/8/2012	12:58:59 AM	SiCl4 pre valve closed
10/8/2012	12:58:59 AM	SiCl4 post valve closed
10/8/2012	12:58:59 AM	Bypass valve closed
10/8/2012	12:58:59 AM	Bubbler valve closed
10/8/2012	12:58:59 AM	Main Vac valve opened
10/8/2012	12:58:59 AM	Helium MFC set to  0.000000
10/8/2012	12:58:59 AM	H2 MFC set to  0.000000
10/8/2012	12:58:59 AM	BCl3 MFC set to  0.000000
10/8/2012	12:58:59 AM	PH3 MFC set to  0.000000
10/8/2012	12:58:59 AM	SiCl4 MFC set to  0.000000
10/8/2012	12:58:59 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	12:58:59 AM	Tube furnace set to 0
10/8/2012	12:59:00 AM	Run finished at 12:59 AM
10/8/2012	12:59:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/8/2012	12:59:12 AM	Helium MFC set to  20.000000
10/8/2012	12:59:19 AM	Helium valve opened
10/8/2012	1:00:16 AM	Helium valve closed
10/8/2012	1:00:36 AM	Helium valve opened
10/8/2012	1:01:10 AM	Helium valve closed
10/8/2012	1:01:29 AM	Helium valve opened
10/8/2012	1:02:10 AM	Helium valve closed
10/8/2012	1:02:32 AM	Main Vac valve closed
10/8/2012	1:02:35 AM	Main Vac valve opened
10/8/2012	1:02:40 AM	Helium valve opened
10/8/2012	1:02:49 AM	Helium valve closed
10/8/2012	1:03:06 AM	Helium MFC set to  0.000000
10/8/2012	1:03:18 AM	Recipe started at 1:03 AM
10/8/2012	1:03:18 AM	Helium valve closed
10/8/2012	1:03:18 AM	H2 valve closed
10/8/2012	1:03:18 AM	BCl3 valve closed
10/8/2012	1:03:18 AM	PH3 valve closed
10/8/2012	1:03:18 AM	SiCl4 pre valve closed
10/8/2012	1:03:18 AM	SiCl4 post valve closed
10/8/2012	1:03:18 AM	Main Vac valve closed
10/8/2012	1:03:18 AM	Bypass valve closed
10/8/2012	1:03:18 AM	Bubbler valve closed
10/8/2012	1:03:18 AM	Helium MFC set to  0.000000
10/8/2012	1:03:18 AM	H2 MFC set to  0.000000
10/8/2012	1:03:18 AM	BCl3 MFC set to  0.000000
10/8/2012	1:03:18 AM	PH3 MFC set to  0.000000
10/8/2012	1:03:18 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:03:18 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:03:18 AM	Tube furnace set to 0
10/8/2012	1:03:21 AM	Helium valve closed
10/8/2012	1:03:21 AM	BCl3 valve closed
10/8/2012	1:03:21 AM	PH3 valve closed
10/8/2012	1:03:21 AM	SiCl4 pre valve closed
10/8/2012	1:03:21 AM	SiCl4 post valve closed
10/8/2012	1:03:21 AM	Main Vac valve closed
10/8/2012	1:03:21 AM	Bypass valve closed
10/8/2012	1:03:21 AM	Bubbler valve closed
10/8/2012	1:03:21 AM	H2 valve opened
10/8/2012	1:03:21 AM	Helium MFC set to  0.000000
10/8/2012	1:03:21 AM	H2 MFC set to  500.000000
10/8/2012	1:03:21 AM	BCl3 MFC set to  0.000000
10/8/2012	1:03:21 AM	PH3 MFC set to  0.000000
10/8/2012	1:03:21 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:03:21 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:03:21 AM	Tube furnace set to 0
10/8/2012	1:04:26 AM	Helium valve closed
10/8/2012	1:04:26 AM	BCl3 valve closed
10/8/2012	1:04:26 AM	PH3 valve closed
10/8/2012	1:04:26 AM	SiCl4 pre valve closed
10/8/2012	1:04:26 AM	SiCl4 post valve closed
10/8/2012	1:04:26 AM	Main Vac valve closed
10/8/2012	1:04:26 AM	Bypass valve closed
10/8/2012	1:04:26 AM	H2 valve opened
10/8/2012	1:04:26 AM	Bubbler valve opened
10/8/2012	1:04:26 AM	Helium MFC set to  0.000000
10/8/2012	1:04:26 AM	H2 MFC set to  500.000000
10/8/2012	1:04:26 AM	BCl3 MFC set to  0.000000
10/8/2012	1:04:26 AM	PH3 MFC set to  0.000000
10/8/2012	1:04:26 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:04:26 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:04:26 AM	Tube furnace set to 0
10/8/2012	1:04:27 AM	Helium valve closed
10/8/2012	1:04:27 AM	BCl3 valve closed
10/8/2012	1:04:27 AM	PH3 valve closed
10/8/2012	1:04:27 AM	SiCl4 pre valve closed
10/8/2012	1:04:27 AM	SiCl4 post valve closed
10/8/2012	1:04:27 AM	Main Vac valve closed
10/8/2012	1:04:27 AM	Bypass valve closed
10/8/2012	1:04:27 AM	H2 valve opened
10/8/2012	1:04:27 AM	Bubbler valve opened
10/8/2012	1:04:27 AM	Helium MFC set to  0.000000
10/8/2012	1:04:27 AM	H2 MFC set to  500.000000
10/8/2012	1:04:27 AM	BCl3 MFC set to  0.000000
10/8/2012	1:04:27 AM	PH3 MFC set to  0.000000
10/8/2012	1:04:27 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:04:27 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:04:27 AM	Tube furnace set to 950
10/8/2012	1:19:27 AM	Helium valve closed
10/8/2012	1:19:27 AM	PH3 valve closed
10/8/2012	1:19:27 AM	SiCl4 pre valve closed
10/8/2012	1:19:27 AM	SiCl4 post valve closed
10/8/2012	1:19:27 AM	Main Vac valve closed
10/8/2012	1:19:27 AM	Bypass valve closed
10/8/2012	1:19:28 AM	H2 valve opened
10/8/2012	1:19:28 AM	BCl3 valve opened
10/8/2012	1:19:28 AM	Bubbler valve opened
10/8/2012	1:19:28 AM	Helium MFC set to  0.000000
10/8/2012	1:19:28 AM	H2 MFC set to  400.000000
10/8/2012	1:19:28 AM	BCl3 MFC set to  20.000000
10/8/2012	1:19:28 AM	PH3 MFC set to  0.000000
10/8/2012	1:19:28 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:19:28 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:19:28 AM	Tube furnace set to 950
10/8/2012	1:49:28 AM	Helium valve closed
10/8/2012	1:49:28 AM	BCl3 valve closed
10/8/2012	1:49:28 AM	PH3 valve closed
10/8/2012	1:49:28 AM	SiCl4 pre valve closed
10/8/2012	1:49:28 AM	SiCl4 post valve closed
10/8/2012	1:49:28 AM	Main Vac valve closed
10/8/2012	1:49:28 AM	Bypass valve closed
10/8/2012	1:49:28 AM	H2 valve opened
10/8/2012	1:49:28 AM	Bubbler valve opened
10/8/2012	1:49:28 AM	Helium MFC set to  0.000000
10/8/2012	1:49:28 AM	H2 MFC set to  500.000000
10/8/2012	1:49:28 AM	BCl3 MFC set to  0.000000
10/8/2012	1:49:28 AM	PH3 MFC set to  0.000000
10/8/2012	1:49:28 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:49:28 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:49:28 AM	Tube furnace set to 750
10/8/2012	1:50:50 AM	H2 valve closed
10/8/2012	1:50:50 AM	BCl3 valve closed
10/8/2012	1:50:50 AM	PH3 valve closed
10/8/2012	1:50:50 AM	SiCl4 pre valve closed
10/8/2012	1:50:50 AM	SiCl4 post valve closed
10/8/2012	1:50:50 AM	Main Vac valve closed
10/8/2012	1:50:50 AM	Bypass valve closed
10/8/2012	1:50:50 AM	Helium valve opened
10/8/2012	1:50:50 AM	Bubbler valve opened
10/8/2012	1:50:50 AM	Helium MFC set to  500.000000
10/8/2012	1:50:50 AM	H2 MFC set to  0.000000
10/8/2012	1:50:50 AM	BCl3 MFC set to  0.000000
10/8/2012	1:50:50 AM	PH3 MFC set to  0.000000
10/8/2012	1:50:50 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:50:50 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:50:50 AM	Tube furnace set to 0
10/8/2012	1:52:21 AM	Helium valve closed
10/8/2012	1:52:21 AM	H2 valve closed
10/8/2012	1:52:21 AM	BCl3 valve closed
10/8/2012	1:52:21 AM	PH3 valve closed
10/8/2012	1:52:21 AM	SiCl4 pre valve closed
10/8/2012	1:52:21 AM	SiCl4 post valve closed
10/8/2012	1:52:21 AM	Main Vac valve closed
10/8/2012	1:52:21 AM	Bypass valve closed
10/8/2012	1:52:21 AM	Bubbler valve closed
10/8/2012	1:52:21 AM	Helium MFC set to  0.000000
10/8/2012	1:52:21 AM	H2 MFC set to  0.000000
10/8/2012	1:52:21 AM	BCl3 MFC set to  0.000000
10/8/2012	1:52:21 AM	PH3 MFC set to  0.000000
10/8/2012	1:52:21 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:52:21 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:52:21 AM	Tube furnace set to 0
10/8/2012	1:52:22 AM	Run finished at 1:52 AM
10/8/2012	1:52:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/8/2012	1:52:26 AM	Recipe started at 1:52 AM
10/8/2012	1:52:26 AM	Helium valve closed
10/8/2012	1:52:26 AM	H2 valve closed
10/8/2012	1:52:26 AM	BCl3 valve closed
10/8/2012	1:52:26 AM	PH3 valve closed
10/8/2012	1:52:26 AM	SiCl4 pre valve closed
10/8/2012	1:52:26 AM	SiCl4 post valve closed
10/8/2012	1:52:26 AM	Main Vac valve closed
10/8/2012	1:52:26 AM	Bypass valve closed
10/8/2012	1:52:26 AM	Bubbler valve closed
10/8/2012	1:52:26 AM	Helium MFC set to  0.000000
10/8/2012	1:52:26 AM	H2 MFC set to  0.000000
10/8/2012	1:52:26 AM	BCl3 MFC set to  0.000000
10/8/2012	1:52:26 AM	PH3 MFC set to  0.000000
10/8/2012	1:52:26 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:52:26 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:52:26 AM	Tube furnace set to 0
10/8/2012	1:52:29 AM	H2 valve closed
10/8/2012	1:52:29 AM	BCl3 valve closed
10/8/2012	1:52:29 AM	PH3 valve closed
10/8/2012	1:52:29 AM	SiCl4 pre valve closed
10/8/2012	1:52:29 AM	SiCl4 post valve closed
10/8/2012	1:52:29 AM	Main Vac valve closed
10/8/2012	1:52:29 AM	Bypass valve closed
10/8/2012	1:52:29 AM	Bubbler valve closed
10/8/2012	1:52:29 AM	Helium valve opened
10/8/2012	1:52:29 AM	Helium MFC set to  500.000000
10/8/2012	1:52:29 AM	H2 MFC set to  0.000000
10/8/2012	1:52:29 AM	BCl3 MFC set to  0.000000
10/8/2012	1:52:29 AM	PH3 MFC set to  0.000000
10/8/2012	1:52:29 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:52:29 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:52:29 AM	Tube furnace set to 0
10/8/2012	1:52:29 AM	Helium valve closed
10/8/2012	1:52:29 AM	H2 valve closed
10/8/2012	1:52:29 AM	BCl3 valve closed
10/8/2012	1:52:29 AM	PH3 valve closed
10/8/2012	1:52:29 AM	SiCl4 pre valve closed
10/8/2012	1:52:29 AM	SiCl4 post valve closed
10/8/2012	1:52:29 AM	Main Vac valve closed
10/8/2012	1:52:29 AM	Bypass valve closed
10/8/2012	1:52:29 AM	Bubbler valve closed
10/8/2012	1:52:29 AM	Helium MFC set to  0.000000
10/8/2012	1:52:29 AM	H2 MFC set to  0.000000
10/8/2012	1:52:29 AM	BCl3 MFC set to  0.000000
10/8/2012	1:52:29 AM	PH3 MFC set to  0.000000
10/8/2012	1:52:29 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:52:29 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:52:30 AM	Tube furnace set to 0
10/8/2012	1:52:31 AM	Run finished at 1:52 AM
10/8/2012	1:52:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/8/2012	1:54:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/8/2012	1:54:46 AM	Recipe started at 1:54 AM
10/8/2012	1:54:46 AM	Helium valve closed
10/8/2012	1:54:46 AM	H2 valve closed
10/8/2012	1:54:46 AM	BCl3 valve closed
10/8/2012	1:54:46 AM	PH3 valve closed
10/8/2012	1:54:46 AM	SiCl4 pre valve closed
10/8/2012	1:54:46 AM	SiCl4 post valve closed
10/8/2012	1:54:47 AM	Main Vac valve closed
10/8/2012	1:54:47 AM	Bubbler valve closed
10/8/2012	1:54:47 AM	Bypass valve opened
10/8/2012	1:54:47 AM	Helium MFC set to  0.000000
10/8/2012	1:54:47 AM	H2 MFC set to  0.000000
10/8/2012	1:54:47 AM	BCl3 MFC set to  0.000000
10/8/2012	1:54:47 AM	PH3 MFC set to  0.000000
10/8/2012	1:54:47 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:54:47 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:54:47 AM	Tube furnace set to 0
10/8/2012	1:55:56 AM	Helium valve closed
10/8/2012	1:55:56 AM	H2 valve closed
10/8/2012	1:55:56 AM	BCl3 valve closed
10/8/2012	1:55:56 AM	PH3 valve closed
10/8/2012	1:55:56 AM	SiCl4 pre valve closed
10/8/2012	1:55:56 AM	SiCl4 post valve closed
10/8/2012	1:55:56 AM	Main Vac valve closed
10/8/2012	1:55:56 AM	Bubbler valve closed
10/8/2012	1:55:56 AM	Bypass valve opened
10/8/2012	1:55:56 AM	Helium MFC set to  0.000000
10/8/2012	1:55:56 AM	H2 MFC set to  0.000000
10/8/2012	1:55:56 AM	BCl3 MFC set to  0.000000
10/8/2012	1:55:56 AM	PH3 MFC set to  0.000000
10/8/2012	1:55:56 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:55:56 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:55:56 AM	Tube furnace set to 0
10/8/2012	1:55:58 AM	Helium valve closed
10/8/2012	1:55:58 AM	H2 valve closed
10/8/2012	1:55:58 AM	BCl3 valve closed
10/8/2012	1:55:58 AM	PH3 valve closed
10/8/2012	1:55:58 AM	SiCl4 pre valve closed
10/8/2012	1:55:58 AM	SiCl4 post valve closed
10/8/2012	1:55:58 AM	Bypass valve closed
10/8/2012	1:55:58 AM	Bubbler valve closed
10/8/2012	1:55:58 AM	Main Vac valve opened
10/8/2012	1:55:58 AM	Helium MFC set to  0.000000
10/8/2012	1:55:58 AM	H2 MFC set to  0.000000
10/8/2012	1:55:58 AM	BCl3 MFC set to  0.000000
10/8/2012	1:55:58 AM	PH3 MFC set to  0.000000
10/8/2012	1:55:58 AM	SiCl4 MFC set to  0.000000
10/8/2012	1:55:58 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	1:55:58 AM	Tube furnace set to 0
10/8/2012	1:55:59 AM	Run finished at 1:55 AM
10/8/2012	1:55:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/8/2012	1:56:05 AM	Helium MFC set to  20.000000
10/8/2012	1:56:38 AM	Helium valve opened
10/8/2012	1:59:56 AM	Helium valve closed
10/8/2012	2:00:12 AM	Helium MFC set to  0.000000
10/8/2012	2:00:32 AM	Recipe started at 2:00 AM
10/8/2012	2:00:32 AM	Helium valve closed
10/8/2012	2:00:32 AM	H2 valve closed
10/8/2012	2:00:33 AM	BCl3 valve closed
10/8/2012	2:00:33 AM	PH3 valve closed
10/8/2012	2:00:33 AM	SiCl4 pre valve closed
10/8/2012	2:00:33 AM	SiCl4 post valve closed
10/8/2012	2:00:33 AM	Main Vac valve closed
10/8/2012	2:00:33 AM	Bypass valve closed
10/8/2012	2:00:33 AM	Bubbler valve closed
10/8/2012	2:00:33 AM	Helium MFC set to  0.000000
10/8/2012	2:00:33 AM	H2 MFC set to  0.000000
10/8/2012	2:00:33 AM	BCl3 MFC set to  0.000000
10/8/2012	2:00:33 AM	PH3 MFC set to  0.000000
10/8/2012	2:00:33 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:00:33 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:00:33 AM	Tube furnace set to 0
10/8/2012	2:00:36 AM	Helium valve closed
10/8/2012	2:00:36 AM	BCl3 valve closed
10/8/2012	2:00:36 AM	PH3 valve closed
10/8/2012	2:00:36 AM	SiCl4 pre valve closed
10/8/2012	2:00:36 AM	SiCl4 post valve closed
10/8/2012	2:00:36 AM	Main Vac valve closed
10/8/2012	2:00:36 AM	Bypass valve closed
10/8/2012	2:00:36 AM	Bubbler valve closed
10/8/2012	2:00:36 AM	H2 valve opened
10/8/2012	2:00:36 AM	Helium MFC set to  0.000000
10/8/2012	2:00:36 AM	H2 MFC set to  500.000000
10/8/2012	2:00:36 AM	BCl3 MFC set to  0.000000
10/8/2012	2:00:36 AM	PH3 MFC set to  0.000000
10/8/2012	2:00:36 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:00:36 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:00:36 AM	Tube furnace set to 0
10/8/2012	2:01:41 AM	Helium valve closed
10/8/2012	2:01:41 AM	BCl3 valve closed
10/8/2012	2:01:41 AM	PH3 valve closed
10/8/2012	2:01:41 AM	SiCl4 pre valve closed
10/8/2012	2:01:41 AM	SiCl4 post valve closed
10/8/2012	2:01:41 AM	Main Vac valve closed
10/8/2012	2:01:41 AM	Bypass valve closed
10/8/2012	2:01:41 AM	H2 valve opened
10/8/2012	2:01:41 AM	Bubbler valve opened
10/8/2012	2:01:41 AM	Helium MFC set to  0.000000
10/8/2012	2:01:41 AM	H2 MFC set to  500.000000
10/8/2012	2:01:41 AM	BCl3 MFC set to  0.000000
10/8/2012	2:01:41 AM	PH3 MFC set to  0.000000
10/8/2012	2:01:41 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:01:41 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:01:41 AM	Tube furnace set to 0
10/8/2012	2:01:42 AM	Helium valve closed
10/8/2012	2:01:42 AM	BCl3 valve closed
10/8/2012	2:01:42 AM	PH3 valve closed
10/8/2012	2:01:42 AM	SiCl4 pre valve closed
10/8/2012	2:01:42 AM	SiCl4 post valve closed
10/8/2012	2:01:42 AM	Main Vac valve closed
10/8/2012	2:01:42 AM	Bypass valve closed
10/8/2012	2:01:42 AM	H2 valve opened
10/8/2012	2:01:42 AM	Bubbler valve opened
10/8/2012	2:01:42 AM	Helium MFC set to  0.000000
10/8/2012	2:01:42 AM	H2 MFC set to  500.000000
10/8/2012	2:01:42 AM	BCl3 MFC set to  0.000000
10/8/2012	2:01:42 AM	PH3 MFC set to  0.000000
10/8/2012	2:01:42 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:01:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:01:42 AM	Tube furnace set to 950
10/8/2012	2:12:43 AM	Helium valve closed
10/8/2012	2:12:43 AM	PH3 valve closed
10/8/2012	2:12:43 AM	SiCl4 pre valve closed
10/8/2012	2:12:43 AM	SiCl4 post valve closed
10/8/2012	2:12:43 AM	Main Vac valve closed
10/8/2012	2:12:43 AM	Bypass valve closed
10/8/2012	2:12:43 AM	H2 valve opened
10/8/2012	2:12:43 AM	BCl3 valve opened
10/8/2012	2:12:43 AM	Bubbler valve opened
10/8/2012	2:12:43 AM	Helium MFC set to  0.000000
10/8/2012	2:12:43 AM	H2 MFC set to  400.000000
10/8/2012	2:12:43 AM	BCl3 MFC set to  20.000000
10/8/2012	2:12:43 AM	PH3 MFC set to  0.000000
10/8/2012	2:12:43 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:12:43 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:12:43 AM	Tube furnace set to 950
10/8/2012	2:42:43 AM	Helium valve closed
10/8/2012	2:42:43 AM	BCl3 valve closed
10/8/2012	2:42:43 AM	PH3 valve closed
10/8/2012	2:42:43 AM	SiCl4 pre valve closed
10/8/2012	2:42:43 AM	SiCl4 post valve closed
10/8/2012	2:42:43 AM	Main Vac valve closed
10/8/2012	2:42:43 AM	Bypass valve closed
10/8/2012	2:42:43 AM	H2 valve opened
10/8/2012	2:42:43 AM	Bubbler valve opened
10/8/2012	2:42:43 AM	Helium MFC set to  0.000000
10/8/2012	2:42:43 AM	H2 MFC set to  500.000000
10/8/2012	2:42:43 AM	BCl3 MFC set to  0.000000
10/8/2012	2:42:43 AM	PH3 MFC set to  0.000000
10/8/2012	2:42:43 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:42:43 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:42:43 AM	Tube furnace set to 750
10/8/2012	2:46:22 AM	H2 valve closed
10/8/2012	2:46:22 AM	BCl3 valve closed
10/8/2012	2:46:22 AM	PH3 valve closed
10/8/2012	2:46:22 AM	SiCl4 pre valve closed
10/8/2012	2:46:22 AM	SiCl4 post valve closed
10/8/2012	2:46:22 AM	Main Vac valve closed
10/8/2012	2:46:22 AM	Bypass valve closed
10/8/2012	2:46:22 AM	Helium valve opened
10/8/2012	2:46:22 AM	Bubbler valve opened
10/8/2012	2:46:22 AM	Helium MFC set to  500.000000
10/8/2012	2:46:22 AM	H2 MFC set to  0.000000
10/8/2012	2:46:22 AM	BCl3 MFC set to  0.000000
10/8/2012	2:46:22 AM	PH3 MFC set to  0.000000
10/8/2012	2:46:22 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:46:22 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:46:22 AM	Tube furnace set to 0
10/8/2012	2:48:37 AM	Helium valve closed
10/8/2012	2:48:37 AM	H2 valve closed
10/8/2012	2:48:37 AM	BCl3 valve closed
10/8/2012	2:48:37 AM	PH3 valve closed
10/8/2012	2:48:37 AM	SiCl4 pre valve closed
10/8/2012	2:48:37 AM	SiCl4 post valve closed
10/8/2012	2:48:37 AM	Main Vac valve closed
10/8/2012	2:48:37 AM	Bypass valve closed
10/8/2012	2:48:37 AM	Bubbler valve closed
10/8/2012	2:48:37 AM	Helium MFC set to  0.000000
10/8/2012	2:48:37 AM	H2 MFC set to  0.000000
10/8/2012	2:48:37 AM	BCl3 MFC set to  0.000000
10/8/2012	2:48:37 AM	PH3 MFC set to  0.000000
10/8/2012	2:48:37 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:48:37 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:48:37 AM	Tube furnace set to 0
10/8/2012	2:48:38 AM	Run finished at 2:48 AM
10/8/2012	2:54:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/8/2012	2:54:05 AM	Recipe started at 2:54 AM
10/8/2012	2:54:05 AM	Helium valve closed
10/8/2012	2:54:05 AM	H2 valve closed
10/8/2012	2:54:05 AM	BCl3 valve closed
10/8/2012	2:54:05 AM	PH3 valve closed
10/8/2012	2:54:05 AM	SiCl4 pre valve closed
10/8/2012	2:54:05 AM	SiCl4 post valve closed
10/8/2012	2:54:05 AM	Main Vac valve closed
10/8/2012	2:54:05 AM	Bubbler valve closed
10/8/2012	2:54:05 AM	Bypass valve opened
10/8/2012	2:54:05 AM	Helium MFC set to  0.000000
10/8/2012	2:54:05 AM	H2 MFC set to  0.000000
10/8/2012	2:54:05 AM	BCl3 MFC set to  0.000000
10/8/2012	2:54:05 AM	PH3 MFC set to  0.000000
10/8/2012	2:54:05 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:54:05 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:54:05 AM	Tube furnace set to 0
10/8/2012	2:55:41 AM	Helium valve closed
10/8/2012	2:55:41 AM	H2 valve closed
10/8/2012	2:55:41 AM	BCl3 valve closed
10/8/2012	2:55:41 AM	PH3 valve closed
10/8/2012	2:55:41 AM	SiCl4 pre valve closed
10/8/2012	2:55:41 AM	SiCl4 post valve closed
10/8/2012	2:55:41 AM	Main Vac valve closed
10/8/2012	2:55:41 AM	Bubbler valve closed
10/8/2012	2:55:41 AM	Bypass valve opened
10/8/2012	2:55:41 AM	Helium MFC set to  0.000000
10/8/2012	2:55:41 AM	H2 MFC set to  0.000000
10/8/2012	2:55:41 AM	BCl3 MFC set to  0.000000
10/8/2012	2:55:41 AM	PH3 MFC set to  0.000000
10/8/2012	2:55:41 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:55:41 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:55:41 AM	Tube furnace set to 0
10/8/2012	2:55:42 AM	Helium valve closed
10/8/2012	2:55:42 AM	H2 valve closed
10/8/2012	2:55:42 AM	BCl3 valve closed
10/8/2012	2:55:42 AM	PH3 valve closed
10/8/2012	2:55:42 AM	SiCl4 pre valve closed
10/8/2012	2:55:42 AM	SiCl4 post valve closed
10/8/2012	2:55:42 AM	Bypass valve closed
10/8/2012	2:55:42 AM	Bubbler valve closed
10/8/2012	2:55:42 AM	Main Vac valve opened
10/8/2012	2:55:42 AM	Helium MFC set to  0.000000
10/8/2012	2:55:42 AM	H2 MFC set to  0.000000
10/8/2012	2:55:42 AM	BCl3 MFC set to  0.000000
10/8/2012	2:55:42 AM	PH3 MFC set to  0.000000
10/8/2012	2:55:42 AM	SiCl4 MFC set to  0.000000
10/8/2012	2:55:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2012	2:55:42 AM	Tube furnace set to 0
10/8/2012	2:55:43 AM	Run finished at 2:55 AM
10/8/2012	2:55:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
